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Title: Microsystem Design
ISBN: 0792372468
Author:
Stephen D. Senturia
Publicate Date: 2004-12-08
Publish: 2004-12-08
List Price: $104.00
Average Customer Rating: 4.0
Format: Hardcover
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Amazon Lowest New Price: $68.22
Amazon Lowest Used Price: $68.21
Amazon Merchant Price: $68.80
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| Customer Review: |
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1: Wonderful book on a complex subject
In 23 chapters, Senturia brings together a dizzying array of fields of engineering necessary to design micro-electro-mechanical systems (MEMS) and examples of MEMS products. For instance, he covers Euler beam theory, the Navier-Stokes equation, micromachining, feedback circuits, and electronic noise, and then anchors these topics with a gyroscope and a DNA amplifier, among other devices.
Senturia's approach to some chapters strikes me as a little idiosyncratic, but he does convey the principles quite well. His love for the material shines through in a way that many authors cannot manage.
Unlike books on single topics, this text cannot be used as a definitive guide to anything. Because Sentuira only has only 30 pages or so for each of the very broad topics that he covers, he doesn't cover any of them in much depth. However, the reader does get a sense of the issues that each physical domain presents. For those who need to know more, Senturia provides a short list of further reading in each chapter. I think of this book as a comprehensive starting point that can help me determine what further investigation I need.
Aesthetically, the text is somewhat lacking. The small pages are cramped compared to those of larger-format texts, and the figures are subpar.
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2: Very good reference
This book is definitely a must-have for anyone interested in MEMS design. It's one of the classic references on microsystems that everyone should have read at least once.
The sections on mathematical modeling are especially good, and the set of detailed examples at the end are clear and illustrative.
To name some drawbacks, the chapter on fabrication is maybe a bit out of date, and more solved practical exercises are missing.
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3: not that useful as a textbook
This book is good just for a starter's guide to MEMS. It just touches a wide range of topics. But if you want to learn the subject with real understanding, then this book can not help you.
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4: Review on microsystem design
The book tries to cover many different topics at the same time and sometimes makes a quite messy work. However, the book has very good chapters and not so good ones. It provides a good introduction on MEMS fabrication, but a more interested reader will find difficult to fabricate MEMS with the given information. Chapters 5,6,7 and 8 are excellent, but chapters 9, 10,11 and 12 are incomplete and not easily understandable for a Electrical Engineer graduate student. Chapter 13 begins with general equations to be simplified considerably later, giving the impression to the reader that he has learned only a little about fluids. Chapter 11 is quite confusing and chapter 12 lack examples in 2D and 3D lumped models.
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